Plasma Process-Induced Damage: 2000 5th International Symposium

Plasma Process-Induced Damage: 2000 5th International Symposium by Calif.) International Symposium on Plasma Process-Induced Damage (5th : 2000 : Santa Clara epub pdf fb2

Title: Plasma Process-Induced Damage: 2000 5th International Symposium
Author: Calif.) International Symposium on Plasma Process-Induced Damage (5th : 2000 : Santa Clara
ISBN10: 0965157741
ISBN13: 978-0965157742
Publisher: IEEE (December 1, 2000)
Language: English
Subcategory: Engineering
Size PDF: 1414 kb
Size Fb2: 1696 kb
Rating: 5.0/5
Votes: 373
Pages: 182 pages
Other Format: rtf azw doc lrf

Plasma Process-Induced Damage: 2000 5th International Symposium by Calif.) International Symposium on Plasma Process-Induced Damage (5th : 2000 : Santa Clara


pdf epub fb2 djvu



This text covers topics such as: CVD process damage effects; electron shading mechanism; front-end process damage effects; damage in multilevel interconnects; damage effects characterization; 300mm technology; thin dielectrics and degradation mechanisms and antenna test structures and design.